Determination of the depth distribution of subsurface damage during polishing of alumina

High-resolution grazing-incidence parallel-beam powder diffraction has been used to detect the subsurface damage below alumina surfaces subjected to polishing with cerium oxide or diamond. Despite very significant evolution of the surface morphology, no changes in the subsurface strains were observed over a 20min period of polishing with ceria. For both polishing materials, the variation with angle in the full-width at half-height maximum was successfully modelled by a strain distribution that fell exponentially with increasing depth. Although the surface amplitude and depth dependence parameter are coupled, we have been able to place upper limits on the depth to which the damage extends. Under realistic assumptions, the depth of damage induced by 1µm diamond paste is comparable with that from 3µm ceria polish.