Effect of a nanoporous surface on photoluminescence from nanopatterned GaN thin films fabricated by anodic alumina templates |
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| Authors: | Keunjoo Kim Jaeho Choi Mi Jung Deok Ha Woo |
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| Affiliation: | 1. Department of Mechanical Engineering and Research Center of Industrial Technology , Chonbuk National University , Jeonju 561-756, Republic of Korea kimk@chonbuk.ac.kr;3. Department of Mechanical Engineering and Research Center of Industrial Technology , Chonbuk National University , Jeonju 561-756, Republic of Korea;4. Photonic Research Center, Korea Institute of Science and Technology , Seoul 110-756, Republic of Korea |
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| Abstract: | GaN photonic crystal slabs on InGaN/GaN multi-quantum well light-emitting diodes have been formed by dry etching using nanoporous anodic alumina templates, which have a periodic lattice constant of 105 nm and a hole diameter of 45 nm. The photonic crystal slab shows an enhanced intensity of photoluminescence due to the nanohole pattern array producing Fabry–Perot like interference. A rough surface of nanoholes results in a broad spectrum with a small oscillation, and well-ordered multiple facets of nanoholes results in a relatively sharp spectrum with a large oscillation. |
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| Keywords: | photonic crystal InGaN/GaN multi-quantum well photoluminescence porous alumina template |
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