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Nanomachining of nanocrystalline nickel by focused ion beam |
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| Authors: | Hiroyuki Hosokawa Koji Shimojima Hajime Iwasaki Mamoru Mabuchi |
| Institution: | 1. Materials Research Institute for Sustainable Development , National Institute of Advanced Industrial Science and Technology , Nagoya, 463-8560, Japan;2. Department of Energy Science and Technology , Kyoto University, Yoshidahonmachi, Sakyo-ku , Kyoto 606-8501, Japan |
| Abstract: | Nanocrystalline and sub-microcrystalline samples of nickel have been machined by a focused Ga+ ion beam (30?keV and 187?pA) at doses of 8.92?×?1016?–?2.68?×?1018 ions/cm2 and their surface topography was investigated by atomic force microscopy (AFM). Values of the root-mean-square (RMS) roughness increase with increasing ion dose. The surfaces of the nanocrystalline Ni were smoother than those of the sub-microcrystalline Ni, indicating that smoothing due to diffusion for the former works more effectively than that for the latter. |
| Keywords: | mechanical properties metallic glass indentation electron microscopy nucleation |