Unusual stress behaviour of CeO2-doped diamond-like carbon nanofilms |
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| Authors: | Z. Y. Zhang X. C. Lu J. B. Luo |
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| Affiliation: | 1. State Key Laboratory of Tribology , Tsinghua University , Beijing 100084, China;2. Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology , Dalian 116024, China zzy@dlut.edu.cn.;4. State Key Laboratory of Tribology , Tsinghua University , Beijing 100084, China |
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| Abstract: | CeO2-doped diamond-like carbon (DLC) films with thicknesses of 180–200 nm were deposited by unbalanced magnetron sputtering. When the CeO2 concentration is in the range 5–8%, the residual compressive stress of the deposited films is reduced by 90%, e.g. from about 4.1 GPa to 0.5 GPa, whereas their adhesion strength increases. These effects are attributed to the dissolution of CeO2 within the DLC amorphous matrix and a widening interface between the DLC film and the Si substrate, respectively. |
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| Keywords: | palladium nanoparticles catalysts STEM–HAADF tomography |
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