Quantitative prediction of phase transformations in silicon during nanoindentation |
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| Authors: | Liangchi Zhang Animesh Basak |
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| Affiliation: | 1. Laboratory for Precision and Nano Processing Technologies, School of Mechanical and Manufacturing Engineering, The University of New South Wales , Sydney , NSW , 2052 , Australia Liangchi.Zhang@unsw.edu.au;3. Laboratory for Precision and Nano Processing Technologies, School of Mechanical and Manufacturing Engineering, The University of New South Wales , Sydney , NSW , 2052 , Australia |
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| Abstract: | This paper establishes the first quantitative relationship between the phases transformed in silicon and the shape characteristics of nanoindentation curves. Based on an integrated analysis using TEM and unit cell properties of phases, the volumes of the phases emerged in a nanoindentation are formulated as a function of pop-out size and depth of nanoindentation impression. This simple formula enables a fast, accurate and quantitative prediction of the phases in a nanoindentation cycle, which has been impossible before. |
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| Keywords: | phase transformation silicon quantitative prediction nanoindentation |
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