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The rapid increase of surface area-volume ratio (SVR) with shrinking structure size has a great impact on surface-related intrinsic dissipation, which usually leads to low quality factors for the devices composed of nanoelectromechanical systems. In the present study, the flexural oscillations of nanocantilevers with varying thicknesses and lengths were simulated using the molecular dynamics method, in which the surface effects on the energy dissipation was evaluated when SVR was increased to extremely large values (between 0.4 and 2.0 nm?1). And, it is also interesting to note that the prediction of the size-dependent Young's modulus by means of resonant frequency of the underdamped oscillation showed good agreement with previous findings.  相似文献   
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